GaN/air gap based micro-opto-electro-mechanical (MOEM) Fabry-Pérot filters
نویسندگان
چکیده
E. Cho *, 1, 2 , D. Pavlidis **, 1, 2 , and E. Sillero 1 Department of High Frequency Electronics, Technische Universität Darmstadt, Merckstrasse 25, 64283 Darmstadt, Germany 2 Department of Electrical Engineering and Computer Science, The University of Michigan, Ann Arbor, MI 48109-2122, USA 3 Instituto de Sistemas Optoelectrónicos y Microtecnología and Department of Electronic Engineering, Universidad Politécnica de Madrid, 28040 Madrid, Spain
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تاریخ انتشار 2007